Wafer Scale Functionalization System

Project Summary

In the United States, lung cancer is one of the leading causes of cancer death. To increase the rate of early lung cancer detection, Boston Scientific’s breath sensor team has developed a non-invasive lung cancer screening device. This device uses sensors to measure volatile organic compounds (VOCs) in exhaled breath. The 120 sensors on the device map out a breath print, unique to the individual. The patterns in the VOCs from the breath print are then used to determine whether the individual has lung cancer. The sensors on the lung cancer screening device must go through a functionalization process where they are soaked in a solvent-receptor solution, rinsed, and then dried. Boston Scientific is looking to improve this process by creating a system that functionalizes full or partial wafers, opposed to their current process of functionalizing single sensors.

Design Goal

The goal of this project is to design a system that functionalizes the sensors on the surface of full or partial silicon wafers.

Design Constraints

• The system shall suspend a full and partial 6-inch or 8-inch silicon wafer in the solvent receptor solution.
• The container used during functionalization shall not react with required solvents.
• The system shall allow for processing of silicon wafers in 38 different solvent receptor solutions.
• The system shall not allow evaporation of the solvent receptor solutions.
• The system shall restrict all UV light exposure on the designated wafers that require it during the soaking process.
• The system shall be contained without the possibility of spilling solvent throughout the soaking process.
• The system shall track the wafers throughout the build process for traceability, while also tracking the time spent soaking, rinsing, and drying.
• HMIS labels shall be attached to and visible on the containers used during the functionalization process.